Quantitative X-ray diffraction analysis of surface layers by computed depth profiling

Thin Solid Films

Volumn 279, Issue 1-2, 1996, Pages 53-58

  Luo, Jian ^a   Tao, Kun ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Depth profiling; Structural properties; X ray diffraction

Indexed keywords

ALGORITHMS; INTERFACES (MATERIALS); MATHEMATICAL TECHNIQUES; METALLIC FILMS; NONDESTRUCTIVE EXAMINATION; POLYCRYSTALLINE MATERIALS; STRUCTURE (COMPOSITION); SURFACES; X RAY DIFFRACTION ANALYSIS;

COMPUTER DEPTH PROFILING; STRUCTURAL PROPERTIES; X RAY POLYCRYSTALLINE DIFFRACTION PATTERNS;

THIN FILMS;

EID: 0030165325     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08131-3     Document Type: Article

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