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Volumn 21, Issue 6, 2000, Pages 583-586
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Sputter-deposited Ti-Ni-Cu shaped memory alloy thin films
a a a a |
Author keywords
Phase transformation; Residual stress; Shape memory alloys; Thin films; Ti Ni Cu
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Indexed keywords
ELECTRIC CONDUCTIVITY MEASUREMENT;
FILM PREPARATION;
HYSTERESIS;
MAGNETRON SPUTTERING;
MARTENSITIC TRANSFORMATIONS;
MICROANALYSIS;
RESIDUAL STRESSES;
SILICON;
TEMPERATURE;
TENSILE STRESS;
THIN FILMS;
TITANIUM ALLOYS;
ELECTRON PROBE MICROANALYSIS;
SUBSTRATE CURVATURE MEASUREMENT;
TEMPERATURE HYSTERESIS;
TITANIUM NICKEL COPPER ALLOYS;
SHAPE MEMORY EFFECT;
COPPER-NICKEL ALLOY;
FILM;
TITANIUM ALLOY;
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EID: 0034580667
PISSN: 02641275
EISSN: None
Source Type: Journal
DOI: 10.1016/s0261-3069(00)00007-8 Document Type: Conference Paper |
Times cited : (23)
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References (16)
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