Laterally self-oscillated and force-balanced micro vibratory gyroscope packaged in a vacuum package with a conditioning ASIC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 76-85

  Park, Kyu Yeon ^a   Lee, Chong Won ^b   Oh, Yong Soo ^c   Lee, Byeungleul ^c  

^a Samsung Electro Mechanics   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Fish hook spring; Force balancing; Gyroscope; Self oscillation; Vacuum package

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; DRIVES; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRODES; HOOKS; MEATS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SPRINGS (COMPONENTS); SPRINGS (WATER); SURFACE MICROMACHINING; VACUUM;

AC DRIVING VOLTAGES; ACTIVE STRUCTURES; DC BIASES; EQUIVALENT NOISES; FORCE-BALANCING; LIMIT CYCLES; NONLINEAR BEHAVIORS; NOVEL CONCEPTS; POSITION SENSES; PROOF MASSES; SELF-OSCILLATION; SENSING RANGES; SURFACE MICROMACHINING TECHNOLOGIES; TORR VACUUMS; VACUUM PACKAGE; VIBRATORY GYROSCOPES; WAFER SURFACES;

GYROSCOPES;

EID: 33745175975     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293579     Document Type: Conference Paper

References (8)

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