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Volumn 220, Issue 3, 2000, Pages 336-340
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High-rate deposition of LiNb1-xTaxO3 films by thermal plasma spray CVD
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
FILM PREPARATION;
LITHIUM COMPOUNDS;
PLASMA SPRAYING;
SAPPHIRE;
SUBSTRATES;
FULL-WIDTH AT HALF-MAXIMUM (FWHM);
PLASMA ATOMIC EMISSION SPECTROSCOPY;
OPTICAL FILMS;
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EID: 0034514167
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(00)00854-X Document Type: Article |
Times cited : (13)
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References (17)
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