Thomson scattering measurement of electron density and temperature of a microwave plasma produced in a hydrogen gas at a moderate pressure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 A, 2000, Pages 6732-6736

  Narishige, Soushi ^a   Suzuki, Seiji ^a   Bowden, Mark D ^a   Uchino, Kiichiro ^a   Muraoka, Katsunori ^a   Sakoda, Tadanori ^b   Park, Won Zoo ^c  

^a KYUSHU UNIVERSITY   (Japan)

^b KITAKYUSHU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c Yeungnam University   (South Korea)

Author keywords

Electron density; Electron temperature; Microwave plasma; Thomson scattering

Indexed keywords

CARRIER CONCENTRATION; DIAMOND FILMS; HYDROGEN; MICROWAVES; MONOCHROMATORS; PLASMAS; PRESSURE EFFECTS; TEMPERATURE MEASUREMENT;

MICROWAVE PLASMAS; THOMSON SCATTERING;

ELECTRON SCATTERING;

EID: 0034472621     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6732     Document Type: Article

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