Comparative study of physical and electrical characteristics of F-and C-doped low-K CVD oxides

Advanced Metallization Conference (AMC)

Volumn , Issue , 2000, Pages 603-609

  Wu, Zhen Cheng ^a   Shiung, Zhi Wen ^a   Chiang, Chiu Chih ^a   Wu, Wei Hao ^a   Chen, Mao Chieh ^a   Jeng, Shwang Ming ^a   Chang, Weng ^a   Chou, Pei Fen ^a   Jang, Syun Ming ^a   Yu, Chen Hua ^a   Liang, Mong Song ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; PYROLYSIS; SILICATES; THERMODYNAMIC STABILITY;

ORGANOSILICATE GLASS;

SEMICONDUCTING GLASS;

EID: 0034460447     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)