Characterization of plasma-polymerized Divinylsiloxane Benzocyclobutene (DVS-BCB) polymer film

Advanced Metallization Conference (AMC)

Volumn , Issue , 2000, Pages 579-585

  Tada, Munehiro ^a   Kawahara, Jun ^a   Hayashi, Yoshihiro ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; INTERCONNECTION NETWORKS; PERMITTIVITY; PLASMA APPLICATIONS; POLYMERIZATION; SILICONES; THERMODYNAMIC STABILITY; ULSI CIRCUITS;

POLYMER FILMS;

SEMICONDUCTING FILMS;

EID: 0034458817     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Part of SPIE conference on muitilevel interconnect technology II