Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4226, Issue , 2000, Pages 69-76

  Wang, C ^a   Chan, Y C ^a   Lam, Y L ^a   Zhao, L P ^a   Zhou, Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Computer control program; Diffractive micro optical lens; Direct laser writing

Indexed keywords

COMPUTER CONTROL SYSTEMS; ELECTROMAGNETIC WAVE DIFFRACTION; ELECTRON BEAMS; ELECTRON DEVICE MANUFACTURE; LASER APPLICATIONS; OPTICAL DESIGN; OPTOELECTRONIC DEVICES; PHOTORESISTS; QUALITY CONTROL;

DIFFRACTIVE OPTICAL ELEMENTS; DIFFRACTIVE OPTICAL LENS; DIRECT LASER WRITING; FABRICATION PARAMETERS;

LENSES;

EID: 0034452947     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.404841     Document Type: Conference Paper

References (11)

1. Binary optics technology: Theoretical limits on the diffraction efficiency of multilevel diffractive optical elements
2. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
3. Development and applications of a laser writing lithography system for maskless patterning
4. Fabrication of micro optical components by laser beam writing in photoresist
5. Direct laser writing of diffractive optical elements
6. Optical methods for fine line lithography
7. Direct writing of continuous-relief micro-optics
8. Development of a laser writing system for the fabrication micro-optical elements
9. Development of micro-lens arrays for integration with optoelectronic devices