A three-phase model for the structure of porous thin films determined by x-ray reflectivity and small-angle neutron scattering

Materials Research Society Symposium-Proceedings

Volumn 612, Issue , 2000, Pages D5221-D5225

  Wu, Wen Li ^a   Lin, Eric K ^a   Jin, Changming ^b   Wetzel, Jeffrey T ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; MOISTURE; NANOSTRUCTURED MATERIALS; NEUTRON SCATTERING; PERMITTIVITY; PORE SIZE; POROUS MATERIALS; THERMAL EXPANSION; X RAY SPECTROSCOPY;

HIGH RESOLUTION SPECULAR X RAY REFLECTIVITY;

THIN FILMS;

EID: 0034429680     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-612-d5.22.1     Document Type: Article

References (11)