Dose uniformity of a compact beamline in routine operation with a storage ring "AURORA-2S"

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 B, 2000, Pages 6931-6935

  Hirose, Sayumi ^a   Amano, Daizo ^a   Miyatake, Tsutomu ^a   Li, Xuan ^a   Hori, Toshitada ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Beam position; Beamline; SR profile; Uniformity; X ray lithography

Indexed keywords

STORAGE RINGS; SYNCHROTRON RADIATION;

COMPACT BEAMLINES;

X RAY LITHOGRAPHY;

EID: 0034429407     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.6931     Document Type: Article

References (10)

1. J. P. Sliverman, C. N. Archie, J. M. Oberschmidt and R. P. Rippstein: J. Vac. Sci. & Technol. B 11 (1993) 2976.
2. H. Shimano, T. Hifumi and Y. Ozaki: Jpn. J. Appl. Phys. 31 (1992) 4185.
3. T. Kaneko, Y. Saitoh, S. Itabashi and H. Yoshihara: J. Vac. Sci. & Technol. 69 (1991) 3214.
4. Y. Watanabe, S. Hara, N. Mizusawa, Y. Fukuda and S. Uzawa: J. Vac. Sci. & Technol. B 15 (1997) 2503.
5. S. Hirose, T. Miyatake, Xuan Li, E. Toyota, M. Hirose, K. Fujii and K. Suzuki: to be published in J. Vac. Sci. & Technol.
6. T. Hori and T. Takayama: Proc. 4th Int. Conf. SR Sources & 2th Asian Forum SR, Korea, 1995 (POSTECH, Korea, 2000) p. 148.
7. T. Amano, T. Hori and T. Takayama: to be published in Proc. 7th European Particle Accelerator Conf., Austria Center Vienna, 2000.
8. E. Toyota: Jpn. J. Appl. Phys. 38 (1999) 3513.
9. C. Welnak, G. J. Chen and F. Cerrina: Nucl. Instrum. & Methods Phys. Res. A 347 (1994) 344.
10. H. Shimano, K. Asano, Y. Ozaki and Y. Matsui: Jpn. J. Appl. Phys. 33 (1994) 6888.