Influence of nanometre-sized notch and water on the fracture behaviour of single crystal silicon microelements

Fatigue and Fracture of Engineering Materials and Structures

Volumn 23, Issue 12, 2000, Pages 1033-1040

  Minoshima, K ^a   Terada, T ^b   Komai, K ^a  

^a KYOTO UNIVERSITY   (Japan)

^b NOMURA RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NOTCHED MICROCANTILEVER BEAM SAMPLES;

ATOMIC FORCE MICROSCOPY; CRACK PROPAGATION; DUCTILITY; FAILURE ANALYSIS; FRACTURE MECHANICS; ION BEAMS; MICROMACHINING; NANOSTRUCTURED MATERIALS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

SEMICONDUCTING SILICON;

EID: 0034429170     PISSN: 8756758X     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1460-2695.2000.00354.x     Document Type: Article

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