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Volumn 609, Issue , 2000, Pages
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Si-H vibration only at 2000 cm-1 in fully polycrystalline silicon films made by HWCVD
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL BONDS;
CRYSTAL MICROSTRUCTURE;
FILM PREPARATION;
GRAIN BOUNDARIES;
INTERFACES (MATERIALS);
MOLECULAR VIBRATIONS;
RAMAN SCATTERING;
SEMICONDUCTING FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
VIBRATION SHIFTS;
POLYSILICON;
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EID: 0034428455
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-609-a22.1 Document Type: Conference Paper |
Times cited : (2)
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References (11)
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