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Volumn 609, Issue , 2000, Pages

Si-H vibration only at 2000 cm-1 in fully polycrystalline silicon films made by HWCVD

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL MICROSTRUCTURE; FILM PREPARATION; GRAIN BOUNDARIES; INTERFACES (MATERIALS); MOLECULAR VIBRATIONS; RAMAN SCATTERING; SEMICONDUCTING FILMS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0034428455     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-609-a22.1     Document Type: Conference Paper
Times cited : (2)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.