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Volumn 621, Issue , 2000, Pages
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Nitrogen containing hydrogenated amorphous carbon prepared by integrated distributed electron cyclotron resonance for large area field emission displays
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
AMORPHOUS MATERIALS;
COMPOSITION EFFECTS;
ELECTRIC CONDUCTIVITY;
ELECTRON CYCLOTRON RESONANCE;
FIELD EMISSION DISPLAYS;
FILM GROWTH;
HYDROGENATION;
NITROGEN;
INTEGRATED DISTRIBUTED ELECTRON CYCLOTRON RESONANCE (IDECR);
CARBON;
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EID: 0034428315
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-621-q1.6.1 Document Type: Conference Paper |
Times cited : (7)
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References (16)
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