Laser plasma X-ray source using gas target mixed fine particle

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3886, Issue , 2000, Pages 610-617

  Matsui, Tetsuya ^a   Kogawa, Nobuyoshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; ENERGY EFFICIENCY; PARTICLES (PARTICULATE MATTER); PHOTOLITHOGRAPHY; PLASMA SOURCES; X RAY LASERS;

EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PLASMA X-RAY SOURCES;

HIGH POWER LASERS;

EID: 0033874360     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.375160     Document Type: Conference Paper

References (14)