Microwave plasma nitriding of a low-alloy steel

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2715-2721

  Hovorka, D ^a   Vlcek J ^a   Cerstvy R ^a   Musil, J ^a   Belsky P ^a   Ruzicka M ^a   Han, Jeon G ^b  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; MICROWAVES; PLASMA APPLICATIONS; PRESSURE EFFECTS; STEEL HEAT TREATMENT; SUBSTRATES; SURFACE PROPERTIES;

GAS MIXTURES; LOW-ALLOY STEEL; MICROWAVE PLASMA NITRIDING; SUBSTRATE TEMPERATURE;

NITRIDING;

EID: 0034318491     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1308587     Document Type: Article

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