|
Volumn 97, Issue 1-3, 1997, Pages 729-733
|
Reactivity of a DC-pulsed plasma: Plasma diagnostics and nitrided sample analysis
|
Author keywords
Afterglow; DC pulsed plasma; Nitrogen; Plasma nitriding; Reactivity
|
Indexed keywords
CARRIER CONCENTRATION;
EMISSION SPECTROSCOPY;
MOLECULAR VIBRATIONS;
NITRIDING;
NITROGEN;
PLASMA DIAGNOSTICS;
PROBES;
REACTION KINETICS;
SURFACE DISCHARGES;
DIRECT CURRENT PULSED NITRIDING PLASMAS;
NITRIDED SAMPLE ANALYSIS;
OPTICAL EMISSION SPECTROSCOPY;
SURFACE TREATMENT;
|
EID: 0031341701
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00320-4 Document Type: Article |
Times cited : (11)
|
References (19)
|