SCOPUS 정보 검색 플랫폼

Volumn 18, Issue 6, 2000, Pages 3185-3189

Optimal strategy for controlling linewidth on spherical focal surface arrays

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; INFRARED DEVICES; ION BEAMS; SUBSTRATES;

FOCAL SURFACE ARRAYS;

PHOTOLITHOGRAPHY;

EID: 0034318267 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1319842 Document Type: Article

Times cited : (6)

References (6)

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3
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- U. Behringer and H. Engelke, J. Vac. Sci. Technol. B 11, 2400 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2400
- Behringer, U.¹ Engelke, H.²

4
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- D. P. Stumbo, G. A. Damm, S. Sen, D. W. Engler, F.-O. Fong, J. C. Wolfe, and J. A. Oro, J. Vac. Sci. Technol. B 9, 2879 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 2879
- Stumbo, D.P.¹ Damm, G.A.² Sen, S.³ Engler, D.W.⁴ Fong, F.-O.⁵ Wolfe, J.C.⁶ Oro, J.A.⁷

5
- 0040114839
- R. Kaesmaier, H. Löschner, G. Stengl, J. C. Wolfe, and P. Ruchhoeft, J. Vac. Sci. Technol. B 17, 3091 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3091
- Kaesmaier, R.¹ Löschner, H.² Stengl, G.³ Wolfe, J.C.⁴ Ruchhoeft, P.⁵

6
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- S. Sen, D. P. Stumbo, F.-O. Fong, G. A. Damm, D. W. Engler, J. C. Wolfe, and J. N. Randall, J. Vac. Sci. Technol. B 8, 1941 (1990).
- (1990) J. Vac. Sci. Technol. B , vol.8 , pp. 1941
- Sen, S.¹ Stumbo, D.P.² Fong, F.-O.³ Damm, G.A.⁴ Engler, D.W.⁵ Wolfe, J.C.⁶ Randall, J.N.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.