Surface morphology and dielectric properties of alkoxy-derived Sr2Ta2O7 and Sr2(Ta, Nb)2O7 thin films

Journal of Materials Science: Materials in Electronics

Volumn 11, Issue 8, 2000, Pages 575-578

  Kato, Kazumi ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; ETHANOL; MOLECULAR ORIENTATION; MOLECULAR STRUCTURE; MORPHOLOGY; STRONTIUM COMPOUNDS; THERMAL EFFECTS; THIN FILMS;

ALKOXIDES;

DIELECTRIC FILMS;

EID: 0034314346     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1008928909648     Document Type: Article

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