Calibration of high-resolution X-ray tomography with atomic force microscopy

Journal of Research of the National Institute of Standards and Technology

Volumn 105, Issue 6, 2000, Pages 867-874

  Kalukin, Andrew R ^a,b,d   Winn, Barry ^c,e   Wang, Yuxin ^c,f   Jacobsen, Chris ^c   Levine, Zachary H ^b   Fu, Joseph ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c STONY BROOK UNIVERSITY   (United States)

^d EASTMAN KODAK COMPANY   (United States)

^e BROOKHAVEN NATIONAL LABORATORY   (United States)

^f X Radia Corp   (United States)

Author keywords

Atomic force microscopy; Scanning electron microscope; X ray microscopy

Indexed keywords

EID: 0034312363     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.105.067     Document Type: Article

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