A study on the effect of air on the dynamic motion of a mems device and its shape optimization

Tribology Transactions

Volumn 43, Issue 4, 2000, Pages 842-846

  Kotera, Hidetoshi ^a   Hirasawa, Taku ^a   Senga, Satoshi ^a   Shima, Susumu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Micro electro mechanical system; Optimization; Stress equilibrium

Indexed keywords

AIR; DEFORMATION; ELECTROSTATICS; GENETIC ALGORITHMS; OPTIMIZATION; STRESS ANALYSIS;

STRESS EQUILIBRIUM;

MICROELECTROMECHANICAL DEVICES;

AIR; DYNAMIC BEHAVIOR; MEMBRANE;

EID: 0034306537     PISSN: 10402004     EISSN: 1547397X     Source Type: Journal    
DOI: 10.1080/10402000008982417     Document Type: Article

References (5)

1. Toshiyoshi, H., Journal of Microelectromechanical Systems, 5, 4, p 231, (1996).
2. Yang, X., Micro Electro Mechanical Systems, p 114, (1997).
3. Koch, M., et al., Sensors and Actuators, 70A, p 98, (1998).
4. Kotera, H., Sakamoto, Y., Hirasawa, T., Shima, S. and Dutton, R. W., MICRO SYSTEM Technologies, p 91, (1998).
5. Goldberg, D. E., Genetic Algorithms in Search Optimization and Machine Learning, Addison Wesley, (1989).