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Volumn 12, Issue 43, 2000, Pages 9189-9194
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Microstructure and electrical properties of ferroelectric Pb(Zr0.53Ti0.47)O3 films on Si with TiO2 buffer layers
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
DEPOSITION;
ELECTRIC POTENTIAL;
EXCIMER LASERS;
FERRIMAGNETIC MATERIALS;
INTERDIFFUSION (SOLIDS);
LEAD COMPOUNDS;
METALLOGRAPHIC MICROSTRUCTURE;
PULSED LASER APPLICATIONS;
SEMICONDUCTING SILICON;
THIN FILMS;
TITANIUM OXIDES;
LEAD ZIRCONIUM TITANATE;
PULSED LASER DEPOSITION;
DIELECTRIC FILMS;
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EID: 0034296440
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/12/43/309 Document Type: Article |
Times cited : (14)
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References (11)
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