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Volumn 21, Issue 10, 2000, Pages 488-490

New poly-Si thin-film transistor with poly-Si/a-Si double active layer

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; CURRENT DENSITY; SEMICONDUCTING SILICON;

EID: 0034296136     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.870610     Document Type: Article
Times cited : (5)

References (7)
  • 1
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    • High-performance TFT's fabricated by XeCl excimer laser annealing of hydrogenated amorphous silicon
    • K. Sera et al., "High-performance TFT's fabricated by XeCl excimer laser annealing of hydrogenated amorphous silicon," IEEE Trans. Electron Devices, vol. 36, pp. 2868-2872, 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2868-2872
    • Sera, K.1
  • 2
    • 0027591006 scopus 로고
    • Physical models for degradation effects in polysilicon thin-film transistors
    • May
    • M. Hack, A. G. Lewis, and I. W. Wu, "Physical models for degradation effects in polysilicon thin-film transistors," IEEE Trans. Electron Devices, vol. 40, pp. 890-897, May 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 890-897
    • Hack, M.1    Lewis, A.G.2    Wu, I.W.3
  • 3
    • 0025417055 scopus 로고
    • Mechanism of device degradation in n-and p-channel polysilicon TFT's by electrical stressing
    • Apr.
    • I. W. Wu et al., "Mechanism of device degradation in n-and p-channel polysilicon TFT's by electrical stressing," IEEE Electron Device Lett., vol. 11, pp. 167-170, Apr. 1990.
    • (1990) IEEE Electron Device Lett. , vol.11 , pp. 167-170
    • Wu, I.W.1
  • 4
    • 0010319488 scopus 로고
    • Degradation due to electrical stress of poly-Si thin film transistors with various LDD lengths
    • June
    • Y. S. Kim and M. K. Han, "Degradation due to electrical stress of poly-Si thin film transistors with various LDD lengths," IEEE Electron Device Lett., vol. 16, pp. 245-247, June 1995.
    • (1995) IEEE Electron Device Lett. , vol.16 , pp. 245-247
    • Kim, Y.S.1    Han, M.K.2
  • 5
    • 0343704946 scopus 로고
    • The effects of fluorine passivation on poly-Si thin film transistors
    • Apr.
    • H. N. Chern, C. L. Lee, and T. F. Lei, "The effects of fluorine passivation on poly-Si thin film transistors," IEEE Trans. Electron Devices, vol. 39, pp. 916-919, Apr. 1994.
    • (1994) IEEE Trans. Electron Devices , vol.39 , pp. 916-919
    • Chern, H.N.1    Lee, C.L.2    Lei, T.F.3
  • 6
    • 0000782864 scopus 로고    scopus 로고
    • Excimer-laser-induced in-situ fluorine passivation effects on polycrystalline silicon thin film transistors
    • C. H. Kim et al., "Excimer-laser-induced in-situ fluorine passivation effects on polycrystalline silicon thin film transistors," Jpn. J. Appl. Phys., vol. 38, pp. 2247-2250, 1999.
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 2247-2250
    • Kim, C.H.1
  • 7
    • 0032615125 scopus 로고    scopus 로고
    • The grain growth blocking effect of polycrystalline silicon film by thin native silicon oxide barrier during the excimer laser recrystallization
    • K. C. Park et al., "The grain growth blocking effect of polycrystalline silicon film by thin native silicon oxide barrier during the excimer laser recrystallization," Appl. Phys. Lett., vol. 75, pp. 460-462, 1999.
    • (1999) Appl. Phys. Lett. , vol.75 , pp. 460-462
    • Park, K.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.