Simulation of a diamond-shaped target with different sizes in plasma based ion implantation

Journal of Physics D: Applied Physics

Volumn 33, Issue 20, 2000, Pages 2647-2652

  Sun, Qi ^a   Ma, Xinxin ^a   Xia, Lifang ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; MATHEMATICAL MODELS; PLASMA SHEATHS;

PLASMA BASED ION IMPLANTATION (PBII);

ION IMPLANTATION;

EID: 0034295673     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/20/317     Document Type: Article

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