Markovian timed Petri Nets for performance analysis of semiconductor manufacturing systems

IEEE Transactions on Systems, Man, and Cybernetics, Part B: Cybernetics

Volumn 30, Issue 5, 2000, Pages 757-771

  Jeng, MuDer ^a,b   Xie, Xiaolan ^c   Hung, WenYuan ^b  

^a IEEE   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^c UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GENERALIZED STOCHASTIC PETRI NETS; MARKOVIAN TIMED PETRI NETS; SEMICONDUCTOR MANUFACTURING SYSTEM; SOFTWARE PACKAGE LINDO; SOFTWARE PACKAGE SIMNET; UNIFORMIZATION TECHNIQUE;

COMPUTER SIMULATION; LINEAR PROGRAMMING; MARKOV PROCESSES; MATHEMATICAL MODELS; OPERATIONS RESEARCH; PERFORMANCE; SEMICONDUCTOR DEVICE MANUFACTURE;

PETRI NETS;

EID: 0034294127     PISSN: 10834419     EISSN: None     Source Type: Journal    
DOI: 10.1109/3477.875450     Document Type: Article

References (12)

1. C. Feng and W.-C. Hung, "Modeling and simulation of a Petri nets-based diffusion cell controller in an IC CIM system," in Proc. 1997 IEEE Int. Conf. Syst., Man, Cybern., Orlando, FL, Oct. 12-15, 1997, pp. 1180-1185.
2. M. D. Jeng, X. L. Xie, and S. W. Chou, "Modeling, qualitative analysis, and performance evaluation of the etching area in an IC wafer fabrication system using Petri nets," IEEE Trans. Semicond. Manufact., vol. 11, pp. 358-373, Aug. 1998.
3. J. Kim and A. A. Desrochers, "Modeling and analysis of semiconductor manufacturing plants using time Petri net models: COT business case study," in Proc. 1997 IEEE Int. Conf. Syst., Man, Cybern., Orlando, FL, Oct. 12-15, 1997, pp. 3227-3232.
4. S. Kumar and P. R. Kumar, "Performance bounds for queueing networks and scheduling policies," IEEE Trans. Automat. Contr., vol. 39, pp. 1600-1611, 1994.
5. Z. Liu, "Performance Analysis of Stochastic Timed Petri Nets Using Linear Programming Approach," INRIA, France, Research Report, no. 2642, 1995.
6. M. A. Marsan, G. Balbo, and G. Conte, "A class of generalized stochastic Petri nets for the performance evaluation of multiprocessor system," ACM Trans. Comput. Syst., vol. 2, pp. 93-122, 1984.
7. M. K. Molloy, "Performance analysis using stochastic Petri nets," IEEE Trans. Comput., vol. C-23, pp. 913-917, 1982.
8. T. Murata, "Petri nets: Properties, analysis, and applications," Proc. IEEE, vol. 77, pp. 541-580, 1989.
9. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach," IEEE Trans. Semicond. Manufact., vol. 11, pp. 333-357, Aug. 1998.
10. G. Chiola, M. A. Marsan, G. Balbo, and G. Conte, "Generalized stochastic Petri nets: A definition at the net level and its implications," IEEE Trans. Softw. Eng., vol. 19, no. 2, pp. 89-107, 1993.
11. J. Campos, G. Chiola, and M. Silva, "Ergodicity and throughput bounds of Petri nets with unique consistent firing count vector," IEEE Trans. Softw. Eng., vol. 17, no. 2, pp. 117-125, 1991.
12. _, "Properties and performance bounds for closed free choice synchronized monoclass queueing networks," IEEE Trans. Automat. Contr., vol. 36, no. 12, pp. 1368-1382, 1991.