Gas recycling and flow control for cost reduction of diamond films deposited by DC arc-jet

Diamond and Related Materials

Volumn 8, Issue 1, 1999, Pages 29-36

  Martorell, Ivan A ^a   Partlow, William D ^a   Young, Robert M ^a   Schreurs, Jan J ^a   Saunders, Howard E ^a  

^a WESTINGHOUSE ELECTRIC COMPANY   (United States)

Author keywords

Chemical vapor deposition; Cost per carat; Gas recycling; Plasma torch; Production cost

Indexed keywords

ANODES; ARGON; COST EFFECTIVENESS; ELECTRIC ARCS; FLOW CONTROL; HYDROGEN; NOZZLES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA JETS; PLASMA THEORY; SYNTHETIC DIAMONDS;

ARC JET DEPOSITION; GAS RECYCLING;

DIAMOND FILMS;

RECYCLING;

EID: 0032988917     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(98)00298-2     Document Type: Article

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