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Volumn 76, Issue 11, 1994, Pages 7567-7577

Experimental measurements and numerical simulations of the gas composition in a hot-filament-assisted diamond chemical-vapor-deposition reactor

(4) McMaster, Mark C a Hsu, Wen L a Coltrin, Michael E b Dandy, David S c

a SANDIA NATIONAL LABORATORIES (United States)

b SANDIA NATIONAL LABORATORIES (United States)

c Department of Environmental and Radiological Health Sciences (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449003282 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.358525 Document Type: Article

Times cited : (51)

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