Structural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing

Diamond and Related Materials

Volumn 9, Issue 9, 2000, Pages 1758-1761

  Zhang, Qing ^a   Yoon, S F ^a   Ahn, J ^a   Rusli, X ^a   Yang, H ^a   Gan, Bo ^a   Yang, Changyi ^b   Watt, F ^b   Teo, E J ^b   Osipowice, T ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION; ELLIPSOMETRY; ENERGY GAP; HARDNESS; ION BOMBARDMENT; ION IMPLANTATION; RAMAN SCATTERING; REFRACTIVE INDEX;

OPTICAL BAND GAP; POLYMERIC AMORPHOUS HYDROGENATED CARBON FILMS; THERMAL ANNEALING;

AMORPHOUS FILMS;

EID: 0034273301     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00331-9     Document Type: Article

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