Implantation effect of diamond-like carbon films by 110 keV nitrogen ions

Thin Solid Films

Volumn 280, Issue 1-2, 1996, Pages 90-94

  Wang, W J ^a   Wang, T M ^a   Jing, C ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Coatings; Fourier transform infrared spectroscopy; Ion implantation; Raman scattering

Indexed keywords

CARBON; COATINGS; ELECTRIC CONDUCTIVITY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN BONDS; ION IMPLANTATION; MODIFICATION; NITROGEN; OPACITY; RAMAN SCATTERING; STRUCTURE (COMPOSITION);

BOND ANGLE DISORDER; DIAMOND LIKE CARBON FILMS; DUAL ION BEAM SPUTTERING;

THIN FILMS;

EID: 0030191127     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08180-1     Document Type: Article

References (20)

1. V.M. Elinson, V.V. Sleptsov, S.S. Gerasimovich, V.I. Polyakov and P.I. Perov, Diamond Relat. Mater., 5(1-2) (1994) 143.
2. B. Dischler, A. Bubenzer and P. Koidl, Solid State Commun., 48 (1983) 105.
3. R.O. Dillon, J.A. Woollam and V. Katkanant, Phys. Rev., B29 (1986) 3482.
4. A.P. Rubshtein, I. Sh. Trakhtenberg and V.B. Vykhodets, Diamond Relat. Mater., 3(4-6) (1994) 688.
5. F. Antoni, B. Prevot, E. Fogarassy and S. de Unamuno, Thin Solid Films, 241 (1-2) (1994) 88.
6. S. Prawer, R. Kalish and M. Adel, Appl. Phys. Lett., 48(23) (1986) 1585.
7. A.P. Malshe, S.M. Chaudhari, S.M. Kanetkar, S.B. Ogale and S.T. shirsagar, Thin Solid Films, 193/194 (1990) 588.
8. F.L. Freire, Jr., C.A. Achete, D.F. Franceschini, C. Gatts and G. Marriotto, Nucl. Instrum. Meth., B80-81 (1993) 1464.
9. H. Watanabe, K. Awazu, H. Yoshida, K. Takahashi and M. Iwaki, Diamond Relat. Mater., 3(8) (1994) 1117.
10. S. Prawer, R. Kalish, M. Adel and V. Richter, Appl. Phys. Lett., 49 (1986) 1157.
11. D.C. Ingram and A.W. McCormick, Nucl. Instrum. Meth., B34 (1988) 68.
12. J.W. Zou, K. Schmidt, K. Reicheit and B. Stritzker, J. Vac. Sci. Technol., A6(6) (1988) 3103.
13. F. Rossi, B. Andre, A. van Veen, P.E. Mijnarends, H. Schut, M.P. Delplancke, W. Gissler, J. Haupt, G. Lucazeau and L. Abello, J. Appl. Phys., 75(6) (1994) 3121.
14. B. Andre, F. Rossi, A. van Veen, P.E. Mijnarends, H. Schut and M.P. Delplancke, Thin Solid Films, 241(1-2) (1994) 171.
15. W.J. Wang, T.M. Wang and B.L. Chen, J. Appl. Phys., 72(1) (1992) 69.
16. T.M. Wang, W.J. Wang and B.L. Chen, Nucl. Instrum. Meth., B71 (1992) 186.
17. T.M. Wang, W.J. Wang, B.L. Chen and S.H. Zhang, Phys. Rev., B50 (1994) 5587.
18. S. Kaplan, F. Jansen and M. Machonkin, Appl. Phys. Lett., 47 (1985) 760.
19. Y. Wang, R.W. Hoffman and J.C. Angus, J. Vac. Sci. Technol., A8(3) (1990) 2226.
20. K. Nakanshi and P.H. Solomon, Infrared Absorption Spectroscopy, Holden-Day, 1977,