Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 47, Issue 5, 2000, Pages 1204-1216

  Tellier, Colette R ^a   Leblois, Théreése G ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL MICROSTRUCTURE; DATABASE SYSTEMS; ETCHING; ITERATIVE METHODS; MICROMACHINING; THREE DIMENSIONAL;

COMBINED STEREOGRAPHIC ANALYSIS; QUARTZ PLATES; RHOMBOHEDRAL FACES; WET CHEMICAL ETCHING;

QUARTZ;

EID: 0034267741     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.869067     Document Type: Article

References (12)

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