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Volumn 43, Issue 1-3, 1994, Pages 65-71

Micromachined gyroscopes

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; PERFORMANCE; QUARTZ; SENSORS;

EID: 0028425210     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)00667-S     Document Type: Article
Times cited : (188)

References (24)
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    • Vibrating angular rate sensor may threaten the gyroscope
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    • J. Söderkvist, A sensor element intended for a gyro, Swed. Patent No. SE 8 900 666 (July 30, 1992)
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    • P. Greiff, B. Boxenhorn, T. King and L. Niles, Silicon monolithic micromechanical gyroscope, Proc. Transducers '91, San Francisco, CA, USA, 1991, pp. 966–968
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    • 84918692811 scopus 로고    scopus 로고
    • R. Payne and K. Dinswood, Surface micromachined accelerometer, a technological update, Poc. SAE Int. Automotive Eng. Cong., Detroit, MI, USA, 1991, pp. 127–135
  • 13
    • 84918675626 scopus 로고    scopus 로고
    • S. Fujishima, T. Nakamura and K. Fujimoto, Piezoelectric vibratory gyroscope using flexural vibration of a triangular bar, Proc. 45th Symp. Frequency Control., Los Angeles, CA, USA, 1991, pp. 261–264
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    • T. Houjiyou, Gyroscope device, Jpn. Patent No. 60-185 111 (Sept. 20, 1985)
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    • J.D. Nuttall, Development of a solid-state gyroscope, Proc. Symp. Gyro Technology, Stuttgart, Germany, 1990, pp. 5.1–5.14
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    • H. Shimizu, T. Yoshida and C. Mashiko, Gyroscope using circular rod type piezoelectric vibrator, Eur. Patent Applic. No. 0 488 370 (Nov. 29, 1991)
  • 19
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    • M. Boruschewitz, S. Gärtner, H.-J. Hamisch, H.-J. Kaiser and G. Pfaff, The development of an inexpensive gyroscope based on the principle of a vibrating piezoelectric plate, Proc. Symp. Gyro Technology, Stuttgart, Germany, 1990, pp. 6.1–6.13
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    • Y. Kawamura, K. Sato, T. Terasawa and S. Tamaka, Angular velocity and acceleration sensor, US Patent No. 4 750 364 (June 14, 1988)
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    • K. Maenaka and T. Shiozawa, Silicon rate sensor using anisotropic etching technology, Proc. Transducers '93, Yokohama, Japan, June 7–10, 1993, pp. 642–645


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.