Residual strain and crystal structure of BaTiO3-SrTiO3 thin films prepared by metal organic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5879-5884

  Funakubo, Hiroshi ^a   Nagano, Daisuke ^a   Saiki, Atsushi ^a   Inagaki, Yoshiaki ^a   Shinozaki, Kazuo ^a   Mizutani, Nobuyasu ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Barium titanium oxide; Lattice parameter; Metal organic chemical vapor deposition; Residual strain; Strontium titanium oxide

Indexed keywords

BARIUM TITANATE; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; FILM PREPARATION; LATTICE CONSTANTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; STRAIN; STRONTIUM COMPOUNDS; THERMAL EXPANSION; THERMAL STRESS; THIN FILMS;

RESIDUAL STRAIN; STRONTIUM TITANATE;

FERROELECTRIC MATERIALS;

EID: 0031222159     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5879     Document Type: Article

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