Electrical conductivity of silicon-on-insulator structures prepared by bonding silicon wafers to a substrate using hydrogen implantation

Semiconductors

Volumn 34, Issue 9, 2000, Pages 1054-1057

  Antonova, I V ^a   Stas', V F ^a   Popov, V P ^a   Obodnikov, V I ^a   Gutakovski A K ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034259284     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1309421     Document Type: Article

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