Comparative study of the surface roughness by AFM and GIXR

Physica Status Solidi (A) Applied Research

Volumn 180, Issue 2, 2000, Pages 479-485

  Zymierska, D ^a   Auleytner, J ^a   Kobiela, T ^b   Dus R ^b  

^a INSTITUTE OF PHYSICS   (Poland)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CRYSTAL GROWTH FROM MELT; CRYSTAL ORIENTATION; SEMICONDUCTING GALLIUM ARSENIDE; SURFACE ROUGHNESS; X RAY CRYSTALLOGRAPHY;

FRESNEL THEORY; GRAZING INCIDENCE X RAY REFLECTOMETRY (GIXR);

SINGLE CRYSTALS;

EID: 0034248490     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200008)180:2<479::AID-PSSA479>3.0.CO;2-U     Document Type: Article

References (15)

1. L. G. PARRATT, Phys. Rev. 95, 359 (1954).
2. S. K. SINHA, E. B. SIROTA, S. GAROFF, and H. B. STANLEY, Phys. Rev. B 38, 2297 (1988).
3. D. K. BOWEN and M. WORMINGTON, Adv. X-Ray Analysis 36, 171 (1993).
4. D. K. BOWEN and B. K. TANNER, Nanotechnology 4, 175 (1993).
5. O. SAKATA, A. Y. NIKULIN, and H. HASHIZUME, Jpn. J. Appl. Phys. 32, 91 (1993).
6. S. DIETRICH and A. HAASE, Phys. Rep. 260, 1 (1995).
7. S. E. ROARK and K. L. ROWLEN, Anal Chem. 60, 261 (1994).
8. D. J. SEMIN and K. L. ROWLEN, Anal. Chem. 66, 4324 (1994).
9. X. M. YANG, K. AJITO, D. A. TRYK, K. HASHIMOTO, and A. FUJISHIMA, J. Phys. Chem. 100, 7293 (1996).
10. S. J. FANG, W. CHEN, T. YAMANAKA, and C. R. HELMS, Appl. Phys. Lett. 68, 2837 (1996).
11. M. WORMINGTON, D. K. BOWEN, K. SAKURAI, and B. K. TANNER, Mater. Res. Soc. Symp. Proc. 332, 525 (1994).
12. R. W. JAMES, The Optical Principles of the Diffraction of X-Rays, Bow Press, Woodbridge 1982.
13. A. H. COMPTON, Phil. Mag. 45, 1121 (1923).
14. M. WORMINGTON, GIXS (Grazing Incidence X-Ray Scattering) software, Bede Scientific Instruments Ltd. and University of Warwick, UK.
15. S. J. FANG, S. HAPLEPETE, W. CHEN, and C. R. HELMS, J. Appl. Phys. 82, 5891 (1997).