Analysis of metal features produced by UV irradiation of organometallic films

Applied Surface Science

Volumn 162, Issue , 2000, Pages 504-507

  Berry, G J ^a   Cairns, J A ^a   Davidson, M R ^a   Fan, Y C ^a   Fitzgerald, A G ^a   Thomson, J ^a   Shaikh, W ^b  

^a UNIVERSITY OF DUNDEE   (United Kingdom)

^b Harwell Science and Innovation Campus   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; GOLD; METALLIZING; MICROANALYSIS; ORGANOMETALLICS; PHOTOLYSIS; PLATINUM; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ENERGY DISPERSIVE X-RAY MICROANALYSIS;

SEMICONDUCTING FILMS;

EID: 0034245597     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00240-3     Document Type: Article

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