Quantifying the oxidation of AlN using electron energy loss spectroscopy

Journal of Physics D: Applied Physics

Volumn 33, Issue 14, 2000, Pages 1647-1655

  MacKenzie, Maureen ^a,b   Craven, Alan J ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ELECTRON ENERGY LOSS SPECTROSCOPY; NITRIDES; OXIDATION; SURFACE PHENOMENA; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; NEAR-EDGE FINE STRUCTURE (NEXAFS);

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0034230301     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/14/303     Document Type: Article

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