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Volumn 113, Issue 1, 2000, Pages 8-17

Purely theoretical electron-impact ionization cross-sections of silicon hydrides and silicon fluorides obtained from explicitly correlated methods

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; BINDING ENERGY; CALCULATIONS; CARRIER CONCENTRATION; ELECTRON ENERGY LEVELS; FLUORINE COMPOUNDS; GROUND STATE; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MOLECULAR VIBRATIONS; SILANES;

EID: 0034227724     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.481768     Document Type: Article
Times cited : (10)

References (42)
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    • (1987) Annu. Rev. Phys. Chem. , vol.87 , pp. 109
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  • 2
    • 0028760952 scopus 로고
    • J. M. Jasinski, B. S. Meyerson, and B. A. Scott, Annu. Rev. Phys. Chem. 87, 109 (1987); P. Fons, T. Motooka, K. Awazu, and H. Onuki, Appl. Surf. Sci. 79/80, 476 (1994); G. Turban, Pure Appl. Chem. 56, 215 (1984).
    • (1994) Appl. Surf. Sci. , vol.79-80 , pp. 476
    • Fons, P.1    Motooka, T.2    Awazu, K.3    Onuki, H.4
  • 3
    • 0020702719 scopus 로고
    • J. M. Jasinski, B. S. Meyerson, and B. A. Scott, Annu. Rev. Phys. Chem. 87, 109 (1987); P. Fons, T. Motooka, K. Awazu, and H. Onuki, Appl. Surf. Sci. 79/80, 476 (1994); G. Turban, Pure Appl. Chem. 56, 215 (1984).
    • (1984) Pure Appl. Chem. , vol.56 , pp. 215
    • Turban, G.1
  • 6
    • 0020720411 scopus 로고
    • H. F. Winters and F. A. Houle, J. Appl. Phys. 54, 1218 (1983); M. J. Vasile and F. A. Stevie, ibid. 53, 3799 (1982); J. A. Dagata, D. W. Squire, C. S. Dulcey, D. S. Y. Hsu, and M. C. Lin, J. Vac. Sci. Technol. B 5, 1495 (1987).
    • (1983) J. Appl. Phys. , vol.54 , pp. 1218
    • Winters, H.F.1    Houle, F.A.2
  • 7
    • 0020126588 scopus 로고
    • H. F. Winters and F. A. Houle, J. Appl. Phys. 54, 1218 (1983); M. J. Vasile and F. A. Stevie, ibid. 53, 3799 (1982); J. A. Dagata, D. W. Squire, C. S. Dulcey, D. S. Y. Hsu, and M. C. Lin, J. Vac. Sci. Technol. B 5, 1495 (1987).
    • (1982) J. Appl. Phys. , vol.53 , pp. 3799
    • Vasile, M.J.1    Stevie, F.A.2
  • 11
    • 0000003835 scopus 로고
    • edited by E. W. McDaniel and M. R. C. McDowell North-Holland, Amsterdam
    • L. Vriens, in Case Studies in Atomic Physics, edited by E. W. McDaniel and M. R. C. McDowell (North-Holland, Amsterdam, 1969), Vol. 1, p. 335.
    • (1969) Case Studies in Atomic Physics , vol.1 , pp. 335
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  • 12
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    • Leipzig
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