Erosion behaviour and surface composition modifications of SiC under D+ ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 111, Issue 1-2, 1996, Pages 63-69

  Plank, H ^a   Schworer R ^a   Roth, J ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL VAPOR DEPOSITION; COMPOSITION; DEUTERIUM; EROSION; INFILTRATION; ION BOMBARDMENT; SILICON CARBIDE; SPUTTERING; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

BULK COMPOSITION; CHEMICAL EROSION; CHEMICAL STATE; ION ENERGY;

FIBER REINFORCED MATERIALS;

EID: 0030125480     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01258-3     Document Type: Article

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