Conductivity and surface potential studies in carbon films by conductive scanning probe microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 6 B, 2000, Pages 3728-3731

  Zhang, Li ^a   Sakai, Tadashi ^a   Sakuma, Naoshi ^a   Ono, Tomio ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

AFM; Carbon films; Conductive SPM; Field emission; KFM; Surface potential; Work function

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; MICROSTRUCTURE;

CONDUCTIVE SCANNING PROBE MICROSCOPY; KELVIN PROBE FORCE MICROSCOPY (KFM); WORK FUNCTIONS;

CARBON;

EID: 0034207146     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.3728     Document Type: Article

References (14)

1. N. S. Xu, Y. Tzeng and R. V. Lantham: J. Phys. D 27 (1994) 1988.
2. D. Hong and M. Aslam: J. Vac. Sci. Technol. B 13 (1995) 427.
3. N. Sakuma, T. Ono and T. Sakai: Proc. IVMC'97, Kyongju, 1997 (EDRAK Press, 1997) p. 451.
4. A. V. Karabutov, V. I. Konov, V. G. Ralchenko, E. D. Obraztsova, V. D. Frolov, S. A. Uglov and M. S. Nunuparov: Diamond & Diamond-like Film Applications, ed. P. J. Gielisse (Technomic Publishing Co., Inc., Pennsylvania, 1998) p. 25.
5. W. Zhu, G. P. Kochanski, S. Jin and L. Seibles: J. Appl. Phys. 78 (1995) 2707.
6. W. P. Kang, A. Wisitsora-at, J. L. Davidson, D. V. Kerns, Q. Li, J. F. Xu and C. K. Kim: J. Vac. Sci. Technol. B 16 (1998) 684.
7. G. A. J. Amaratunga and S. R. P. Silva: Appl. Phys. Lett. 68 (1996) 2529.
8. A. Hart, B. S. Satyanarayana, W. I. Milne and J. Robertson: Appl. Phys. Lett. 74 (1999) 1594.
9. R. Hessmer, M. Schreck, S. Geier and B. Strizker: Diamond Relat. Mater. 3 (1994) 951.
10. G. M. Lynch, J. W. Steeds and J. S. Lee: Appl. Phys. Lett. 69 (1996) 2825.
11. M. W. Geis, J. C. Twichell, J. Macaulay and K. Okano: Appl. Phys. Lett. 67 (1995) 1328.
12. N. A. Fox, W. N. Wang, T. J. Davis, J. W. Steeds and P. W. May: Appl. Phys. Lett. 71 (1997) 2337.
13. L. Zhang, T. Sakai, N. Sakuma, T. Tomio and K. Nakayama: New Diam. Front. Technol. 9 (1999) 53.
14. L. Zhang, T. Sakai, N. Sakuma, T. Tomio and K. Nakayama: Appl. Phys. Lett. 75 (1999) 3527.