End-point detection of polymer etching using Langmuir probes

IEEE Transactions on Plasma Science

Volumn 28, Issue 3, 2000, Pages 1043-1049

  De Castro, Raul Murete ^a   Verdonck, Patrick ^a   Pisani, Marcelo B ^a   Mansano, Ronaldo Domingues ^a   Cirino, Giuseppe Antonio ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; PLASTIC FILMS; POLYMERS; REACTIVE ION ETCHING; SIGNAL DETECTION;

END POINT DETECTION; LANGMUIR PROBES;

PLASMA ETCHING;

EID: 0034197753     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.887774     Document Type: Article

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