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Volumn 70, Issue 5, 2000, Pages 561-564
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Scribing and cutting a blue LED wafer using a Q-switched Nd:YAG laser
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
COMPUTER SOFTWARE;
GALVANOMETERS;
LASER ABLATION;
LIGHT EMITTING DIODES;
NEODYMIUM LASERS;
PLASMA ARC CUTTING;
Q SWITCHED LASERS;
LASER INDUCED PLASMA ASSISTED ABLATION METHOD;
SAPPHIRE WAFER;
SCRIBING;
SAPPHIRE;
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EID: 0034187847
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s003390051080 Document Type: Article |
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Times cited : (18)
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References (8)
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