Real-time spectroscopic ellipsometry for III-V surface modifications hydrogen passivation, oxidation and nitridation by plasma processing

Vacuum

Volumn 57, Issue 2, 2000, Pages 189-199

  Bruno, G ^a   Capezzuto, P ^a   Losurdo, M ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FERMI LEVEL; NITRIDING; OXIDATION; PASSIVATION; PHOTOLUMINESCENCE; PLASMA APPLICATIONS; SEGREGATION (METALLOGRAPHY); SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYGEN PLASMA ANODIZATION; PLASMA NITRIDATION; REAL TIME ELLIPSOMETRY; ULTRAVIOLET IRRADIATION;

SURFACE TREATMENT;

EID: 0034187234     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00127-5     Document Type: Article

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