Liquid compounds for CVD of alkaline earth metals

Materials Research Society Symposium - Proceedings

Volumn 574, Issue , 1999, Pages 23-30

  Gordon, Roy G ^a   Barry, Seän T ^a   Xinye, L I U ^a   Teff, Daniel J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKALINE EARTH METALS; BARIUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION;

BARIUM STRONTIUM TITANATE; DIRECT LIQUID INJECTION;

DIELECTRIC FILMS;

EID: 0033279113     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-574-23     Document Type: Article

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