Cubic boron nitride deposition on silicon substrates at room temperature by KrF excimer laser ablation of h-BN

Applied Physics A: Materials Science and Processing

Volumn 70, Issue 2, 2000, Pages 197-201

  Acquaviva, S ^a   Leggieri, G ^a   Luches, A ^a   Perrone, A ^a   Zocco, A ^a   Laidani, N ^b   Speranza, G ^b   Anderle, M ^b  

^a UNIVERSITY OF SALENTO   (Italy)

^b ITC IRST   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CUBIC BORON NITRIDE; ENERGY DISPERSIVE SPECTROSCOPY; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

HEXAGONAL BORON NITRIDE; PULSED LASER DEPOSITION;

THIN FILMS;

EID: 0034138383     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050032     Document Type: Article

References (20)

1. D.J. Kester, R. Messier: J. Appl. Phys. 72, 504 (1992)
2. R.M. Chrenko: Sol. State Commun. 14, 511 (1974)
3. O. Mishima, K. Era, J. Tanaka, S. Yamaoka: Appl. Phys. Lett. 53, 962 (1988)
4. Y. Andoh, S. Nishiyama, H. Kirimura, T. Mikami, K. Ogata, F. Fujimow: Nucl. Instrum. Methods B 59/60, 276 (1991)
5. A. Schütze, K. Bewilogua, H. Lüthje, S. Kouptsidis, S. Jäger: Surf. Coat. Technol. 74/75, 717 (1995)
6. G.L. Doll, J.A. Sell, C.A. Taylor II, R. Clarke: Phys. Rev. B 43, 6816 (1991)
7. D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, P. Rez, M.J. Mills, K.F. McCarty: J. Appl. Phys. 76, 295 (1994)
8. T. Klotzbücher, W. Pfleging, M. Martin, D.A. Wesner, E.W. Kreutz: Appl. Surf. Sci. 86, 165 (1995)
9. G. Reisse, S. Weissmantel, B. Keiper, A. Weber: Appl. Surf. Sci. 108, 9 (1997)
10. B. Angleraud, M. Cahoreau, I. Jauberteau, J. Aubreton, A. Catherinot: J. Appl. Phys. 83, 3398 (1998)
11. D. Briggs: Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs, M.P. Seah (Wileyn New York 1983) pp. 359-392
12. L.R. Doolittle: Nucl. Instrum. Methods B 9, 344 (1995)
13. J.F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomber: Handbook of X-ray Photoelectron Spectroscopy, ed. by J. Chastain, R.C. King Jr. (Physical Electronics, Inc. 1995)
14. P.J. Gielisse, S.S. Mitra, J N. Plendl, R.D. Griffis, L.C. Mansour, R. Marshall, E.A. Pascoe: Phys. Rev. 155, 1039 (1967)
15. R. Geick, C.H. Perry: Phys. Rev. 146, 543 (1966)
16. Joint Committee on Powder Diffraction Standards, JCPDS International Center for Diffraction Data, Swarthmore, Pensylvania
17. T.A. Friedmann, K.F. McCarty, E.J. Klaus, D. Boehme, W.M. Clift, H.A. Johnsen, M.J. Mills, D.K. Ottesen: Appl. Phys. Lett. 61, 2406 (1992)
18. T.A. Friedmann, P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, E.J. Klaus, D.R. Boehme, H.A. Johnsen, M.J. Mills, D.K. Ottesen, J.C. Barbour: J. Appl. Phys. 76, 3088 (1994)
19. E. D'Anna, M.L. De Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, A. Zocco: Phys. Status Solidi A 166, 581 (1998)
20. S. Acquaviva, A.P. Caricato, M.L. De Giorgi, A. Luches, A. Perrone: Appl. Surf. Sci. 109/110, 408 (1997)