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Journal of Physics D: Applied Physics
Volumn 29, Issue 9, 1996, Pages 2229-2234
Boundaries of the diamond domain in the C-H-O diagram of carbon film deposition
Author keywords

[No Author keywords available]
Indexed keywords

CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; FILM GROWTH; HYDROCARBONS; HYDROGEN BONDS; MATHEMATICAL MODELS; OXYGEN;
EID: 0030246446     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/9/002     Document Type: Article
Times cited : (15)
References (11)
  • 1
    • 0013427940 scopus 로고
    • High performance diamond and diamond-like coatings
    • Bull S J and Chalker P R 1995 High performance diamond and diamond-like coatings J. Miner. Met. Mater. Soc. 47 16
    • (1995) J. Miner. Met. Mater. Soc. , vol.47 , pp. 16
    • Bull, S.J.1    Chalker, P.R.2
  • 2
    • 0026208746 scopus 로고
    • Towards a general concept of diamond chemical vapour deposition
    • Bachmann P K, Leers D and Lydtyn H 1991 Towards a general concept of diamond chemical vapour deposition Diamond Rel. Mater. 1 1
    • (1991) Diamond Rel. Mater. , vol.1 , pp. 1
    • Bachmann, P.K.1    Leers, D.2    Lydtyn, H.3
  • 3
    • 0000484668 scopus 로고
    • Model of the competitive growth of amorphous carbon and diamond films
    • Ford I J 1995 Model of the competitive growth of amorphous carbon and diamond films J. Appl. Phys. 78 510
    • (1995) J. Appl. Phys. , vol.78 , pp. 510
    • Ford, I.J.1
  • 4
    • 0028456016 scopus 로고
    • A mechanism of CVD diamond film growth deduced from the sequential deposition from sputtered carbon and atomic hydrogen
    • Olson D S, Kelly M A, Kapoor S and Hagström S B 1994 A mechanism of CVD diamond film growth deduced from the sequential deposition from sputtered carbon and atomic hydrogen J. Mater. Res. 9 1546
    • (1994) J. Mater. Res. , vol.9 , pp. 1546
    • Olson, D.S.1    Kelly, M.A.2    Kapoor, S.3    Hagström, S.B.4
  • 5
    • 0000205816 scopus 로고
    • Synthesis of diamond films using sequential chemistry: Enhanced growth rate by atomic oxygen
    • Kapoor S, Kelly M A and Hagström S B 1995 Synthesis of diamond films using sequential chemistry: enhanced growth rate by atomic oxygen J. Appl. Phys. 77 6267
    • (1995) J. Appl. Phys. , vol.77 , pp. 6267
    • Kapoor, S.1    Kelly, M.A.2    Hagström, S.B.3
  • 6
    • 21544484514 scopus 로고
    • Mechanism for diamond growth from methyl radicals
    • Harris S J 1990 Mechanism for diamond growth from methyl radicals Appl. Phys. Lett. 56 2298
    • (1990) Appl. Phys. Lett. , vol.56 , pp. 2298
    • Harris, S.J.1
  • 8
    • 0027969589 scopus 로고
    • Thermodynamic approach to the C-H-O deposition diagram in the diamond chemical vapour deposition process
    • Hwang N M, Hahn J H and Bahng G W 1993 Thermodynamic approach to the C-H-O deposition diagram in the diamond chemical vapour deposition process Diamond Rel. Mater. 3 163
    • (1993) Diamond Rel. Mater. , vol.3 , pp. 163
    • Hwang, N.M.1    Hahn, J.H.2    Bahng, G.W.3
  • 9
    • 36449008727 scopus 로고
    • Compositional and spectroscopic study of the growth of diamond films from several gaseous mixtures
    • Marinelli M, Milani E, Montuori M, Paoletti A, Tebano A and Balestrino G 1994 Compositional and spectroscopic study of the growth of diamond films from several gaseous mixtures J. Appl. Phys. 76 5702
    • (1994) J. Appl. Phys. , vol.76 , pp. 5702
    • Marinelli, M.1    Milani, E.2    Montuori, M.3    Paoletti, A.4    Tebano, A.5    Balestrino, G.6

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.