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Volumn 81, Issue 3-4, 2000, Pages 271-277

Investigation of thermoelectric silicide thin films by means of analytical transmission electron microscopy

Author keywords

Electron diffraction; Energy filtered imaging and diffraction; In situ specimen treatment

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; ELECTRON DIFFRACTION; IMAGING TECHNIQUES; MICROSTRUCTURE; RHENIUM COMPOUNDS; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; TEMPERATURE; THIN FILMS;

EID: 0034106308     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00181-3     Document Type: Article
Times cited : (7)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.