메뉴 건너뛰기




Volumn 38, Issue 8, 1991, Pages 758-768

A Silicon-Based, Three-Dimensional Neural Interface: Manufacturing Processes for an Intracortical Electrode Array

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES - ASSEMBLY; SENSORS - SILICON SENSORS; SENSORY AIDS - MANUFACTURE; THERMAL DIFFUSION;

EID: 0026205082     PISSN: 00189294     EISSN: 15582531     Source Type: Journal    
DOI: 10.1109/10.83588     Document Type: Article
Times cited : (680)

References (23)
  • 2
    • 0016964049 scopus 로고
    • Random walk of liquid droplets migrating in silicon
    • T. R. Anthony and H. E. Cline, “Random walk of liquid droplets migrating in silicon,” J. Appl. Phys., vol. 47, no. 6, pp. 2316–2324, 1976.
    • (1976) J. Appl. Phys. , vol.47 , Issue.6 , pp. 2316-2324
    • Anthony, T.R.1    Cline, H.E.2
  • 3
    • 0016964339 scopus 로고
    • Deep-diode arrays
    • —, “Deep-diode arrays,” J. Appl. Phys., vol. 47, no. 6, pp. 2550– 2557, 1976.
    • (1976) J. Appl. Phys. , vol.47 , Issue.6 , pp. 2550-2557
  • 4
    • 0014284770 scopus 로고
    • The sensations produced by electrical stimulation of the visual cortex
    • G. S. Brindley and W. S. Lewin, “The sensations produced by electrical stimulation of the visual cortex,” J. Physiol., vol. 196, pp. 479–493, 1968.
    • (1968) J. Physiol. , vol.196 , pp. 479-493
    • Brindley, G.S.1    Lewin, W.S.2
  • 5
    • 0025697161 scopus 로고
    • A 100 electrode intracortical array: Structural variability
    • P. K. Campbell, K. E. Jones, and R. A. Normann, “A 100 electrode intracortical array: Structural variability,” Biomed. Sci. Instr., vol. 26, pp. 161–166, 1990
    • (1990) Biomed. Sci. Instr. , vol.26 , pp. 161-166
    • Campbell, P.K.1    Jones, K.E.2    Normann, R.A.3
  • 7
    • 84939380996 scopus 로고
    • An investigation in the awake macaque of the threshold for detection of electrical currents applied to striate cortex: Psychophysical properties and laminar differences
    • Ph.D. dissertation, Univ. Rochester, Rochester, NY
    • E. A. De Yoe, “An investigation in the awake macaque of the threshold for detection of electrical currents applied to striate cortex: Psychophysical properties and laminar differences,” Ph.D. dissertation, Univ. Rochester, Rochester, NY, 1983.
    • (1983)
    • de Yoe, E.A.1
  • 8
    • 0016222161 scopus 로고
    • Phosphenes produced by electrical stimulation of human occipital cortex, and their application to the development of a prosthesis for the blind
    • W. H. Dobelle and M. G. Mladejovsky, “Phosphenes produced by electrical stimulation of human occipital cortex, and their application to the development of a prosthesis for the blind,” J. Physiol., vol. 243, pp. 553–576, 1974.
    • (1974) J. Physiol. , vol.243 , pp. 553-576
    • Dobelle, W.H.1    Mladejovsky, M.G.2
  • 9
    • 0022559394 scopus 로고
    • A peripheral nerve information transducer for amputees: Long-term multichannel recordings from rabbit peripheral nerve
    • Feb.
    • D. J. Edell, “A peripheral nerve information transducer for amputees: Long-term multichannel recordings from rabbit peripheral nerve”, IEEE Trans. Biomed. Eng., vol. BME-33, pp. 203–214, Feb. 1986.
    • (1986) IEEE Trans. Biomed. Eng. , vol.BME-33 , pp. 203-214
    • Edell, D.J.1
  • 10
    • 0022991521 scopus 로고
    • Microfabrication technology for development of chronic neural information transducers
    • D. J. Edell, V. M. McNeil, and L. D. Clark, “Microfabrication technology for development of chronic neural information transducers,” Proc. lnternat. Electron Dev. Meet., 1986, pp. 180–183.
    • (1986) Proc. lnternat. Electron Dev. Meet. , pp. 180-183
    • Edell, D.J.1    McNeil, V.M.2    Clark, L.D.3
  • 11
    • 0022448771 scopus 로고
    • Extracellular neural recording with multichannel microelectrodes
    • H. Eichenbaum and M. Kuperstein, “Extracellular neural recording with multichannel microelectrodes,” J. Electrophysiol. Tech., vol. 13, pp. 189–209, 1986.
    • (1986) J. Electrophysiol. Tech. , vol.13 , pp. 189-209
    • Eichenbaum, H.1    Kuperstein, M.2
  • 12
    • 0015640135 scopus 로고
    • Mechanical factors in the design of chronic reading intracortical microelectrodes
    • Apr.
    • S. R. Goldstein and M. Salcman, “Mechanical factors in the design of chronic reading intracortical microelectrodes,” IEEE Trans. Biomed. Eng., vol. BME-20, pp. 260–269, Apr. 1973.
    • (1973) IEEE Trans. Biomed. Eng. , vol.BME-20 , pp. 260-269
    • Goldstein, S.R.1    Salcman, M.2
  • 13
    • 84939341115 scopus 로고
    • Innovative techniques for protective coatings of neural prosthetic devices. Material development and evaluation
    • 11th Quarterly Prog. Rep., NIH Contract No. N01-NS-4-2374
    • A. W. Hahn, “Innovative techniques for protective coatings of neural prosthetic devices. Material development and evaluation,” 11th Quarterly Prog. Rep., NIH Contract No. N01-NS-4-2374, 1987.
    • (1987)
    • Hahn, A.W.1
  • 14
    • 84939327408 scopus 로고
    • Accelerated testing of polyimide coatings for neural prostheses. Polymeric materials for electronics packaging and interconnection
    • J. McHardy, D. I. Basiulis, G. Angsten, L. R. Higley, and R. N. Leyden, “Accelerated testing of polyimide coatings for neural prostheses. Polymeric materials for electronics packaging and interconnection,” ACS Symp. Series, 407, pp. 168–175, 1989.
    • (1989) ACS Symp. Series , vol.407 , pp. 168-175
    • McHardy, J.1    Basiulis, D.I.2    Angsten, G.3    Higley, L.R.4    Leyden, R.N.5
  • 15
    • 0018040934 scopus 로고
    • Photolithographic fabrication and physiological performance of microelectrode arrays for neural stimulation
    • June
    • H. D. Mercer and R. L. White, “Photolithographic fabrication and physiological performance of microelectrode arrays for neural stimulation,” IEEE Trans. Biomed. Eng., vol. BME-25, pp. 494–500, June 1978.
    • (1978) IEEE Trans. Biomed. Eng. , vol.BME-25 , pp. 494-500
    • Mercer, H.D.1    White, R.L.2
  • 16
    • 0024766222 scopus 로고
    • A silicon-based electrode array for intracortical stimulation: Structure and electrical properties
    • R. A. Normann, P. K. Campbell, and K. E. Jones, “A silicon-based electrode array for intracortical stimulation: Structure and electrical properties,” in Proc. IEEE Eng. Med. Biol. Soc., vol. 11, pp. 939– 940, 1989.
    • (1989) Proc. IEEE Eng. Med. Biol. Soc. , vol.11 , pp. 939-940
    • Normann, R.A.1    Campbell, P.K.2    Jones, K.E.3
  • 17
    • 0024111855 scopus 로고
    • Silicon-based mi-crostructures suitable for intracortical electrical stimulation
    • R. A. Normann, P. K. Campbell, and W. P. Li, “Silicon-based mi-crostructures suitable for intracortical electrical stimulation,” in Proc. IEEE Eng. Med. Biol. Soc., vol. 10, pp. 714–715, 1988.
    • (1988) Proc. IEEE Eng. Med. Biol. Soc. , vol.10 , pp. 714-715
    • Normann, R.A.1    Campbell, P.K.2    Li, W.P.3
  • 19
    • 0018563472 scopus 로고
    • Printed circuit microelectrodes
    • Oct.
    • R. S. Pickard, “Printed circuit microelectrodes,” TINS, pp. 259– 261, Oct. 1979.
    • (1979) TINS , pp. 259-261
    • Pickard, R.S.1
  • 20
    • 0022559398 scopus 로고
    • Thin-film multiple electrode probes: Possibilities and limitations
    • Feb.
    • O. J. Prohaska, F. Olcaytug, P. Pfundner, and H. Dragaun, “Thin-film multiple electrode probes: Possibilities and limitations, ”IEEE Trans. Biomed. Eng., vol. BME-33, pp. 223–229, Feb. 1986.
    • (1986) IEEE Trans. Biomed. Eng. , vol.BME-33 , pp. 223-229
    • Prohaska, O.J.1    Olcaytug, F.2    Pfundner, P.3    Dragaun, H.4
  • 21
    • 84975367006 scopus 로고
    • Chemical etching of silicon
    • H. Robbins and B. Schwartz, “Chemical etching of silicon,” J. Electrochem. Soc., vol. 107, no. 2, pp. 108–111, 1960.
    • (1960) J. Electrochem. Soc. , vol.107 , Issue.2 , pp. 108-111
    • Robbins, H.1    Schwartz, B.2
  • 22
    • 0020510876 scopus 로고
    • Excitation of visual cortex neurons by local intracortical microstimulation
    • S. F. RonnerandB. G. Lee, “Excitation of visual cortex neurons by local intracortical microstimulation,” Exp. Neurol., vol. 81, pp. 376– 395, 1983.
    • (1983) Exp. Neurol. , vol.81 , pp. 376-395
    • Ronnerand, S.F.1    Lee, B.G.2
  • 23
    • 0025537668 scopus 로고
    • A system for impact insertion of a 100 electrode array into cortical tissue
    • P. J. Rousche and R. A. Normann, “A system for impact insertion of a 100 electrode array into cortical tissue,” in Proc. IEEE Eng. Med. Biol. Soc., vol. 12, pp. 494–495, 1990.
    • (1990) Proc. IEEE Eng. Med. Biol. Soc. , vol.12 , pp. 494-495
    • Rousche, P.J.1    Normann, R.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.