Nitrogen plasma immersion ion implantation and silicon sputter deposition combined with methane implantation as an in-line process for improving corrosion and wear performance of stainless steels

Surface and Coatings Technology

Volumn 128-129, Issue , 2000, Pages 479-483

  Volz, K ^a   Enders, B ^a   Ensinger, W ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

Corrosion; Nitridation; Plasma immersion ion implantation; Silicon carbide; Wear

Indexed keywords

AMORPHOUS FILMS; ION IMPLANTATION; METHANE; NITRIDING; NITROGEN; PLASMA APPLICATIONS; SILICON CARBIDE; SPUTTER DEPOSITION; STEEL CORROSION; THERMAL DIFFUSION IN SOLIDS; TRIBOLOGY; WEAR OF MATERIALS;

PLASMA DIFFUSION TREATMENT; PLASMA IMMERSION ION IMPLANTATION;

STAINLESS STEEL;

CORROSION RESISTANCE; ION IMPLANTATION; PLASMA TREATMENT; STAINLESS STEEL; WEAR RESISTANCE;

EID: 0033941561     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00624-1     Document Type: Conference Paper

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