High resolution lifetime scan maps of silicon wafers

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 71, Issue 1-3, 2000, Pages 47-50

  Palais, O ^a   Gervais, J ^a   Clerc, L ^a   Martinuzzi, S ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CRYSTALLINE MATERIALS; ELECTROMAGNETIC WAVE REFLECTION; IODINE; MICROWAVES; PASSIVATION;

MINORITY CARRIERS;

SILICON WAFERS;

EID: 0033908108     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00347-5     Document Type: Article

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