Microcrystalline silicon growth on a-Si:H: Effects of hydrogen

Thin Solid Films

Volumn 337, Issue 1-2, 1999, Pages 23-26

  Roca I Cabarrocas, P ^a   Hamma, S ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Ellipsometry; Hydrogen; Long range effects; Microcrystalline silicon; Secondary ion mass spectrometry

Indexed keywords

EID: 0002817737     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01169-9     Document Type: Article

References (7)

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4. P. Roca i Cabarrocas, J.B. Chévier, J. Huc, A. Lloret, J.Y. Parey, J.P.M. Schmitt, J. Vac. Sci. Technol. A9 (1991) 2331.
5. N. Layadi, P. Roca i Cabarrocas, B. Drévillon, I. Solomon, Phys. Rev. B 52 (1995) 5136.
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7. S. Hamma, P. Roca i Cabarrocas, Thin Solid Films 296 (1997) 11.