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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 1, 2000, Pages 316-319

Highly accurate composition analysis of (Pb,Zr)TiO3 using a scanning electron microscope/energy dispersive X-ray spectrometer

(4) Suga, Mitsuo a Torii, Kazuyoshi a Kumihashi, Takashi a Kakibayashi, Hiroshi a

a HITACHI LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ELECTRIC VARIABLES MEASUREMENT; ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; FAILURE ANALYSIS; LEAD COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SIGNAL NOISE MEASUREMENT; SPURIOUS SIGNAL NOISE; ZIRCONIUM COMPOUNDS;

COMPOSITION VARIATION; ELECTRON BEAM ACCELERATION VOLTAGES; OZONE JET EVAPORATION METHOD; SIGNAL GENERATION DEPTH; SOL-GEL METHOD; STATISTICAL NOISE;

FERROELECTRIC MATERIALS;

EID: 0033906956 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.39.316 Document Type: Article

Times cited : (1)

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